Advanced materials broaden applications and increase performance in semiconductor manufacturing
NORTH VANCOUVER, BC /ACCESSWIRE/August 31, 2022/ Accelerating, a leader in the design and manufacture of fiber optic sensing solutions for the semiconductor, industrial, IoT, medical and power distribution markets, today announced granted US patent 10793772 B1 for Kristonium™, the primary photoluminescent material used in its fluorescent fiber optic sensors. Kristonium replaces traditional phosphor materials, allowing fiber optic sensors to increase performance and enabling extended thermal control in extreme temperatures and harsh operating environments.
“This patent is a fundamental breakthrough in fiber optic sensing materials that addresses critical aspects of precision control in semiconductor manufacturing,” said Michael Goldstein, CEO of Accelovant. “Accelovant’s fiber optic sensors using Kristonium enable better temperature control across the wafer, further improving wafer uniformity, chamber matching and process control in extremely high temperature applications. and cryogenic.
Kristonium’s impacts on semiconductor manufacturing performance and cost include:
- Wider operating temperature range: Older fiber optic sensors begin to fail above 250 degrees Celsius and below minus 40 degrees Celsius. Kristonium increases the operating range from minus 95 degrees Celsius to over 450 degrees Celsius.
- Superior Accuracy Over Entire Temperature Range: Kristonium’s measurement accuracy is ±0.10 degrees Celsius for the entire measurement range, with no calibration requirements. This compares to legacy sensor accuracy of ±1.0 degrees Celsius at minus 95 degrees Celsius and ±0.50 at ±2.0 degrees Celsius for applications requiring long-term exposure above 300 degrees Celsius.
- Improved measurement repeatability: Kristonium-based sensors have a repeatability of ±0.005 degrees Celsius, providing repeatability performance 10 times better than existing sensors.
- Inert to vacuum and process chemistry: Kristonium is a high durability ceramic-like material that is inert to extreme operating conditions, including semiconductor vacuum applications, exposure to process chemistry and applications requiring physical durability.
Semiconductor manufacturing yields are critically dependent on precise process temperature control on the wafer. Until now, full system measurement accuracy of ±0.10 degrees Celsius was considered impossible under plasma manufacturing conditions due to the limitations of legacy technologies. The new material now opens the door to high-temperature, cryogenic-level plasma-enhanced applications, previously considered impossible environments for fiber optic sensors.
“Semiconductor efficiency and cost dynamics are directly related to the ability to more precisely control process temperatures. Kristonium enables much-needed improvements in temperature accuracy, operating range, and durability,” said continued Goldstein. “This breakthrough is one of the most significant advances in materials since the advent of fiber optic thermometry more than 50 years ago.”
To learn more about Accelovant fiber optic temperature sensor solutions, please visit www.accelovant.com.
Based in North Vancouver, British Columbia, Accelovant is a leader in the design and manufacture of fiber optic sensing solutions for the semiconductor, industrial, IoT, medical and security markets. power distribution. With a vertically integrated approach that combines mastery of materials science with design expertise, Accelovant delivers measurement solutions that increase yields, reduce costs, and provide exceptional domain and product support. Details are available at www.accelovant.com.
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THE SOURCE: Accelerating